Thermal Mass Flowmeters/Controllers


The Smart Series of flowmeters and controllers offer fast response time and high turn-down range coupled with excellent accuracy. Real gas and multiple gas calibrations are available.

RS485 and optional Profibus make the Smart Series an optimal solution for gas mixing as part of TrigasFI's TriClick Gas Mixing system and other similar applications.


Measuring Principle: Thermal Mass, CMOS Sensor
Sizes: ¼“ and ½“ Female G
Flow ranges: 2 nml/min to 450 nl/min
(Controllers up to 250 nl/min)
Accuracy: +/- 0.3% FS + 0.5% OR
Calibration Gases: Air, O2, N2, He, Ar, CO2, H2, CH4, C3H8, SF6, Others upon request